GaN单晶的HVPE生长与掺杂进展

齐占国, 刘磊, 王守志, 王国栋, 俞娇仙, 王忠新, 段秀兰, 徐现刚, 张雷

Progress in GaN Single Crystals: HVPE Growth and Doping

QI Zhanguo, LIU Lei, WANG Shouzhi, WANG Guogong, YU Jiaoxian, WANG Zhongxin, DUAN Xiulan, XU Xiangang, ZHANG Lei

图6 Mg掺杂HVPE-GaN

Fig. 6 Mg-doped HVPE-Ga (a) Schematic of the HVPE system for growth of Mg doped GaN using MgO[53]; (b) Hole concentration measured at room temperature as a function of Mg concentration[55]; (c) Compensating donor concentration (Nd) and acceptor concentration (Na) as a function of Mg concentration[55]