GaN单晶的HVPE生长与掺杂进展
Progress in GaN Single Crystals: HVPE Growth and Doping
GaN单晶的HVPE生长与掺杂进展 |
| 齐占国, 刘磊, 王守志, 王国栋, 俞娇仙, 王忠新, 段秀兰, 徐现刚, 张雷 |
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Progress in GaN Single Crystals: HVPE Growth and Doping |
| QI Zhanguo, LIU Lei, WANG Shouzhi, WANG Guogong, YU Jiaoxian, WANG Zhongxin, DUAN Xiulan, XU Xiangang, ZHANG Lei |
| 图2 HVPE反应器的结构[ |
| Fig. 2 Structure of HVPE reactor[ |
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