GaN单晶的HVPE生长与掺杂进展

齐占国, 刘磊, 王守志, 王国栋, 俞娇仙, 王忠新, 段秀兰, 徐现刚, 张雷

Progress in GaN Single Crystals: HVPE Growth and Doping

QI Zhanguo, LIU Lei, WANG Shouzhi, WANG Guogong, YU Jiaoxian, WANG Zhongxin, DUAN Xiulan, XU Xiangang, ZHANG Lei

图1 GaN示意图[4]

Fig. 1 Schematic diagram of GaN[4] (a) Hexagonal unit call (left) and the bond structure of GaN (right), with green balls indicating Ga atoms and blue balls indicating N atoms; (b) Polar face (left), non-polar face (middle) and one kind of semi-polar faces (right) of GaN crystal