新型GaN与ZnO衬底ScAlMgO4晶体的研究进展

张超逸, 唐慧丽, 李宪珂, 王庆国, 罗平, 吴锋, 张晨波, 薛艳艳, 徐军, 韩建峰, 逯占文

Research Progress of ScAlMgO4 Crystal: a Novel GaN and ZnO Substrate

ZHANG Chaoyi, TANG Huili, LI Xianke, WANG Qingguo, LUO Ping, WU Feng, ZHANG Chenbo, XUE Yanyan, XU Jun, HAN Jianfeng, LU Zhanwen

图4 SCAM的热学性质[37]

Fig. 4 Thermal properties of SCAM[37] (a) Cell parameters for SCAM as a function of temperature based on the high temperature XRD; (b, c) Length of a-axis (b) and the axial thermal expansion coefficient for a-axis (c) of SCAM in comparison to those of GaN, ZnO and Al2O3