新型GaN与ZnO衬底ScAlMgO4晶体的研究进展 |
张超逸, 唐慧丽, 李宪珂, 王庆国, 罗平, 吴锋, 张晨波, 薛艳艳, 徐军, 韩建峰, 逯占文 |
Research Progress of ScAlMgO4 Crystal: a Novel GaN and ZnO Substrate |
ZHANG Chaoyi, TANG Huili, LI Xianke, WANG Qingguo, LUO Ping, WU Feng, ZHANG Chenbo, XUE Yanyan, XU Jun, HAN Jianfeng, LU Zhanwen |
图7 提拉法生长SCAM单晶[ |
Fig. 7 SCAM single crystal grown by Cz method[ (a) SCAM single crystal with the dimension of ϕ30 mm×59 mm grown by Cz method; (b) Interference photograph of (0001) SCAM wafer under the polarizing microscopy |