离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜
张辉1, 马永军2, 王艺程1, 文丹丹1, 叶飞3, 白飞明1

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering
ZHANG Hui1, MA Yong-Jun2, WANG Yi-Cheng1, WEN Dan-Dan1, YE Fei3, BAI Fei-Ming1
图7 PZT-NFO薄膜在不同溅射功率和溅射时间下的表面形貌照片
Fig. 7 Surface morphologies of PZT-NFO films deposited at 160 W for 2 h a, 160 W for 4 h b and 200 W for 4 h c Here, substrate temperature was fixed at 800℃ and argon over oxygen ratio was 1:1