离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜
张辉1, 马永军2, 王艺程1, 文丹丹1, 叶飞3, 白飞明1

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering
ZHANG Hui1, MA Yong-Jun2, WANG Yi-Cheng1, WEN Dan-Dan1, YE Fei3, BAI Fei-Ming1
图6 不同条件下制备的PZT-NFO薄膜的横断面SEM照片和EDS分析
Fig. 6 Cross-sectional SEM image and EDS analysis of PZT-NFO films deposited under different growth conditions a 160 W, 2 h; b 160 W, 4 h; c 400 W, 4 h; d 160 W, 6 h. Here, substrate temperature was 800℃ and argon over oxygen ratio was 1:1