离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜
张辉1, 马永军2, 王艺程1, 文丹丹1, 叶飞3, 白飞明1

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering
ZHANG Hui1, MA Yong-Jun2, WANG Yi-Cheng1, WEN Dan-Dan1, YE Fei3, BAI Fei-Ming1
图5 氩氧比在2:1 a和1:1 b条件下, 沉积6 h薄膜的 M-H 曲线图溅射温度为800℃, 功率为160 W
Fig. 5 M-H curves of PZT-NFO films deposited at 160 W, 800℃ for 6 h with argon over oxygen ratio of 2:1a and 1:1b