离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜
张辉1, 马永军2, 王艺程1, 文丹丹1, 叶飞3, 白飞明1

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering
ZHANG Hui1, MA Yong-Jun2, WANG Yi-Cheng1, WEN Dan-Dan1, YE Fei3, BAI Fei-Ming1
图4 氩氧比在2:1a和1:1b条件下沉积薄膜的XRD h 0 l 线扫描图谱基片温度为800℃, 溅射功率仍为160 W
Fig. 4 h 0 l line scans of PZT-NFO films deposited at 160W, 800℃ with argon over oxygen ratio of 2:1a and 1:1b c and d are amplification figure from corresponding figure a and b