离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜
张辉1, 马永军2, 王艺程1, 文丹丹1, 叶飞3, 白飞明1

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering
ZHANG Hui1, MA Yong-Jun2, WANG Yi-Cheng1, WEN Dan-Dan1, YE Fei3, BAI Fei-Ming1
图2 基片温度分别为700℃a、800℃b、850℃c时, 沉积2 h薄膜的表面形貌
Fig. 2 Surface morphologies of PZT-NFO films deposited at 700℃a, 800℃b and 850℃c for 2 h Here, argon over oxygen ratio was fixed at 1:1 and sputtering power was fixed at 160 W