离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜
张辉1, 马永军2, 王艺程1, 文丹丹1, 叶飞3, 白飞明1

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering
ZHANG Hui1, MA Yong-Jun2, WANG Yi-Cheng1, WEN Dan-Dan1, YE Fei3, BAI Fei-Ming1
图1 基片温度分别为700℃a,d、800℃b,e、850℃c,f时, PZT-NFO薄膜的00 l 和 h 0 l XRD线扫描图
Fig. 1 00 l and h 0 l line scans of PZT-NFO films deposited at 700℃a,d, 800℃b,e and 850℃c,f a, b and c are the 00 l line scans, and d, e and f are the h 0 l line scans