原子层沉积生长速率的控制研究进展

卢维尔¹, 董亚斌^1,², 李超波¹, 夏洋¹, 李楠¹

Research Progress on Growth Rate Controlling of Atomic Layer Deposition

LU Wei-Er¹, DONG Ya-Bin^1,², LI Chao-Bo¹, XIA Yang¹, LI Nan¹

图2 aZnO薄膜的沉积速率随着生长时间的变化关系 [ 11 ] ; bZnO薄膜沉积过程中岛状ZnO的形成 [ 12 ] ; cALD沉积ZrO 2 过程中每层沉积Zr的沉积速率随着循环数的变化 [ 13 ] ; dZrO 2 沉积过程中ZrO 2 岛的形成 [ 13 ]
Fig. 2 aRelationship between the ZnO film growth rate and the growth time [ 11 ] ; b ZnO island formed during the ZnO film deposition process [ 12 ] ; c Zr growth rate depended on the number of ALD reaction cycles [ 13 ] ; d ZrO2 island formed during the ZrO2 film deposition process [ 13 ]