铜对双靶共溅制备热电薄膜输运性能的影响

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CAO Li-Li, WANG Yao, DENG Yuan, LUO Bing-Wei, ZHU Wei, SHI Yong-Ming, LIN Zhen

Fig. 3 The temperature-dependent thermoelectric properties for the Cu-dispersed Bi 0.5 Sb 1.5 Te 3 films sputterned at different powers