铜对双靶共溅制备热电薄膜输运性能的影响
Influence of Cu on Transport Properties of Thermoelectric Thin Film Fabricated
铜对双靶共溅制备热电薄膜输运性能的影响 |
| 曹丽莉, 王瑶, 邓元, 罗炳威, 祝薇, 史永明, 林桢 |
Influence of Cu on Transport Properties of Thermoelectric Thin Film Fabricated |
| Fig. 2 SEM images of the 00l oriented Bi 0.5 Sb 1.5 Te 3 films a, b Surface morphology and cross-sectional view of Cu-dispersed films sputtered at 5 W; c, d Surface morphology and cross-sectional view of Cu-dispersed films sputtered at 10 W; e, f Surface morphology and cross-sectional view of Cu-dispersed films sputtered at 20 W; g, h Surface morphology and cross-sectional view of Cu-dispersed films sputtered at 40 W |
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