铜对双靶共溅制备热电薄膜输运性能的影响
曹丽莉, 王瑶, 邓元, 罗炳威, 祝薇, 史永明, 林桢
Influence of Cu on Transport Properties of Thermoelectric Thin Film Fabricated
via
Magnetron Co-sputtering Method
CAO Li-Li, WANG Yao, DENG Yuan, LUO Bing-Wei, ZHU Wei, SHI Yong-Ming, LIN Zhen
Fig. 1 XRD patterns of Cu-dispersed Bi 0.5 Sb 1.5 Te 3 films sputtered with different Cu target powers