高能微波辐照条件下SiC晶粒的生长过程分析

黄珊, 王继刚, 刘松, 李凡

Growth Process of SiC Grains Prepared by High-energy Microwave Irradiation

HUANG Shan, WANG Ji-Gang, LIU Song, LI Fan

图3 不同合成方法得到SiC晶粒的表面形貌对比
Fig. 3 Morphology comparison between the SiC grains obtained via different approaches a and b: Morphologies of the SiC chip obtained by PVT method [ 32 ] , c: Morphology of the SiC grain obtained by high-energy microwave irradiation