氧化锌脱膜和激光刻蚀制备亚微米自支撑聚酰亚胺薄膜及其性能

刘仁臣, 吴永刚, 夏子奂

Preparation and Properties of Submicron Free-standing Polyimide Thin Film Using ZnO Demoulding and Laser Ablation

LIU Ren-Chen, WU Yong-Gang, XIA Zi-Huan

图3 ZnO薄膜腐蚀后的AFM形貌a, b和XRD图谱c
Fig. 3 AFM morphologies a, b and XRD patterns c of ZnO films after etching a Sputtered at 25℃; b Sputtered at 400℃