氧化锌脱膜和激光刻蚀制备亚微米自支撑聚酰亚胺薄膜及其性能

刘仁臣, 吴永刚, 夏子奂

Preparation and Properties of Submicron Free-standing Polyimide Thin Film Using ZnO Demoulding and Laser Ablation

LIU Ren-Chen, WU Yong-Gang, XIA Zi-Huan

图7 厚度分别为950 nm 和150 nm自支撑PI薄膜的傅里叶变换红外光谱a和300~2500 nm波段的透过率曲线b
Fig. 7 Fourier transform infrared spectra a and transmittance spectra in the wavelength between 300 nm and 2500 nm b of the 950 nm and 150 nm free-standing PI films