氧化锌脱膜和激光刻蚀制备亚微米自支撑聚酰亚胺薄膜及其性能

刘仁臣, 吴永刚, 夏子奂

Preparation and Properties of Submicron Free-standing Polyimide Thin Film Using ZnO Demoulding and Laser Ablation

LIU Ren-Chen, WU Yong-Gang, XIA Zi-Huan

图1 亚微米自支撑PI薄膜制备工艺流程图
Fig. 1 Flow chart of preparing submicron free-standing PI thin film