化学蚀刻法制备纳米硅线作为高能锂离子电池的负极
李剑文, 周爱军, 刘兴泉, 李晶泽

Si Nanowire Anode Prepared by Chemical Etching for High Energy Density Lithium-ion Battery
LI Jian-Wen, ZHOU Ai-Jun, LIU Xing-Quan, LI Jing-Ze
图1 金属催化剂化学蚀刻法制备纳米硅线阵列过程示意图
Fig. 1 Fabrication process of Si nanowires array by metal catalyst assisted chemical etching method