AlN/FeCoSiB磁电复合薄膜的制备及其逆磁电效应研究

童贝, 杨晓非, 林更琪, 陈实, 欧阳君

Preparation and Converse Magnetoelectric Effect of AlN/FeCoSiB Magnetoelectric Composite Films

TONG Bei, YANG Xiao-Fei, LIN Geng-Qi, CHEN Shi, OUYANG Jun

图2 未退火和500℃退火后AlN薄膜的XRD图谱
Fig. 2 XRD patterns of AlN thin film as-deposited a and annealed at 500℃b