GaN基LED图形衬底的性能研究
李程程1, 徐智谋1, 孙堂友1, 王智浩1, 王双保1, 张学明1, 彭静2

Research for Patterned Sapphire Substrates of GaN-based LEDs
LI Cheng-Cheng1, XU Zhi-Mou1, SUN Tang-You1, WANG Zhi-Hao1, WANG Shuang-Bao1, ZHANG Xue-Ming1, PENG Jing2
图11 纳米圆台蓝宝石图形衬底SEM照片
Fig. 11 SEM images of the table-like nano-sapphire patterned substrates