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GaN基LED图形衬底的性能研究
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李程程1, 徐智谋1, 孙堂友1, 王智浩1, 王双保1, 张学明1, 彭静2 |
Research for Patterned Sapphire Substrates of GaN-based LEDs
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LI Cheng-Cheng 1, XU Zhi-Mou 1, SUN Tang-You 1, WANG Zhi-Hao 1, WANG Shuang-Bao 1, ZHANG Xue-Ming 1, PENG Jing 2
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图8 纳米圆台蓝宝石图形衬底的制备工艺流程图 Fig. 8 Preparation process flow diagram of the table-like nano- sapphire patterned substrates |
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