GaN基LED图形衬底的性能研究
李程程1, 徐智谋1, 孙堂友1, 王智浩1, 王双保1, 张学明1, 彭静2

Research for Patterned Sapphire Substrates of GaN-based LEDs
LI Cheng-Cheng1, XU Zhi-Mou1, SUN Tang-You1, WANG Zhi-Hao1, WANG Shuang-Bao1, ZHANG Xue-Ming1, PENG Jing2
图7 纳米圆台柱图形衬底LED的光提取效率随有效深度的变化结果
Fig. 7 Light extraction efficiency of table pillar nano-patterned sapphire substrate changed with depth