V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响

许俊华, 薛雅平, 曹峻, 喻利花

Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films

XU Jun-Hua, XUE Ya-Ping, CAO Jun, YU Li-Hua

图6 TaN单层膜在600℃时形成的磨痕形貌a及其XRD图谱b
Fig. 6 SEM image a and XRD pattern b of wear track of TaN film at 600℃