V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响

许俊华, 薛雅平, 曹峻, 喻利花

Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films

XU Jun-Hua, XUE Ya-Ping, CAO Jun, YU Li-Hua

图4 不同V含量的TaVN复合膜的摩擦系数曲线a和平均摩擦系数曲线b
Fig. 4 Friction coefficient curves a and average coefficient curve b of TaVN films with different V contents