V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响
许俊华
, 薛雅平, 曹峻, 喻利花
Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films
XU Jun-Hua
, XUE Ya-Ping, CAO Jun, YU Li-Hua
图3 不同V含量的TaVN复合膜的硬度
Fig. 3 Hardness of TaVN composite films with different V contents