V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响

许俊华, 薛雅平, 曹峻, 喻利花

Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films

XU Jun-Hua, XUE Ya-Ping, CAO Jun, YU Li-Hua

图1 TaVN复合膜中Ta和V含量
Fig. 1 Contents of Ta and V in the TaVN composited films