不同基底上SiO<sub>2</sub>薄膜的显微结构和力学性能

不同基底上SiO₂薄膜的显微结构和力学性能

王河^1,², 贺洪波¹, 张伟丽¹

Substrate Effects on the Microstructure and Mechanical Properties of SiO₂ Thin Films

WANG He^1,², HE Hong-Bo¹, ZHANG Wei-Li¹

图9 YAG100上SiO 2 薄膜的划痕SEM照片
Fig. 9 cross-section SEM image of scratch track of SiO 2 fim on YAG100