不同基底上SiO<sub>2</sub>薄膜的显微结构和力学性能

不同基底上SiO₂薄膜的显微结构和力学性能

王河^1,², 贺洪波¹, 张伟丽¹

Substrate Effects on the Microstructure and Mechanical Properties of SiO₂ Thin Films

WANG He^1,², HE Hong-Bo¹, ZHANG Wei-Li¹

图8 YAG100上SiO 2 薄膜的a划入深度-位置曲线、b和c划痕形貌
Fig. 8 Depth-displacement curves a and scratch track profiles b, c of SiO 2 film on YAG100