不同基底上SiO<sub>2</sub>薄膜的显微结构和力学性能

不同基底上SiO₂薄膜的显微结构和力学性能

王河^1,², 贺洪波¹, 张伟丽¹

Substrate Effects on the Microstructure and Mechanical Properties of SiO₂ Thin Films

WANG He^1,², HE Hong-Bo¹, ZHANG Wei-Li¹

图7 YAG111上SiO 2 薄膜的划痕截面SEM a和BSE b照片
Fig. 7 SEM a and BSE b images of scratch track cross- section profiles of SiO 2 fim on YAG111