不同基底上SiO<sub>2</sub>薄膜的显微结构和力学性能

不同基底上SiO₂薄膜的显微结构和力学性能

王河^1,², 贺洪波¹, 张伟丽¹

Substrate Effects on the Microstructure and Mechanical Properties of SiO₂ Thin Films

WANG He^1,², HE Hong-Bo¹, ZHANG Wei-Li¹

图6 YAG111上SiO 2 薄膜的a划入深度-位置曲线和b划痕形貌
Fig. 6 Depth-displacement a curves and scratch track profiles b of SiO 2 film on YAG111