不同基底上SiO<sub>2</sub>薄膜的显微结构和力学性能

不同基底上SiO₂薄膜的显微结构和力学性能

王河^1,², 贺洪波¹, 张伟丽¹

Substrate Effects on the Microstructure and Mechanical Properties of SiO₂ Thin Films

WANG He^1,², HE Hong-Bo¹, ZHANG Wei-Li¹

图4 K9上SiO 2 薄膜的a划入深度-位置曲线b划痕形貌
Fig. 4 aDepth-displacement curves and b scratch track profiles of SiO 2 film on K9