不同基底上SiO2薄膜的显微结构和力学性能
王河1,2, 贺洪波1, 张伟丽1

Substrate Effects on the Microstructure and Mechanical Properties of SiO2 Thin Films
WANG He1,2, HE Hong-Bo1, ZHANG Wei-Li1
图4 K9上SiO 2 薄膜的a划入深度-位置曲线b划痕形貌
Fig. 4 aDepth-displacement curves and b scratch track profiles of SiO 2 film on K9