不同基底上SiO2薄膜的显微结构和力学性能
王河1,2, 贺洪波1, 张伟丽1

Substrate Effects on the Microstructure and Mechanical Properties of SiO2 Thin Films
WANG He1,2, HE Hong-Bo1, ZHANG Wei-Li1
图1 K9、YAG111和YAG100上SiO 2 薄膜的GXRD图谱
Fig. 1 GXRD patterns of SiO 2 films on K9, YAG111 and YAG 100