不同基底上SiO
2
薄膜的显微结构和力学性能
王河
1,
2
, 贺洪波
1
, 张伟丽
1
Substrate Effects on the Microstructure and Mechanical Properties of SiO
2
Thin Films
WANG He
1,
2
, HE Hong-Bo
1
, ZHANG Wei-Li
1
图1 K9、YAG111和YAG100上SiO 2 薄膜的GXRD图谱
Fig. 1 GXRD patterns of SiO 2 films on K9, YAG111 and YAG 100