AZO薄膜用于GaN基LED透明电极的性能研究
陈丹1, 吕建国1, 黄靖云1, 金豫浙2, 张昊翔2, 叶志镇1

Performances of GaN-based LEDs with AZO Films as Transparent Electrodes
CHEN Dan1, L#cod#x000dc; Jian-Guo1, HUANG Jing-Yun1, JIN Yu-Zhe2, ZHANG Hao-Xiang2, YE Zhi-Zhen1
图5 退火前后AZOGaN界面处Na和Gab元素SIMS对比图谱
Fig. 5 SIMS spectra of N a and Al b elements at the AZOGaN interface before and after annealing