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AZO薄膜用于GaN基LED透明电极的性能研究
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陈丹1, 吕建国1, 黄靖云1, 金豫浙2, 张昊翔2, 叶志镇1 |
Performances of GaN-based LEDs with AZO Films as Transparent Electrodes
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CHEN Dan 1, L#cod#x000dc; Jian-Guo 1, HUANG Jing-Yun 1, JIN Yu-Zhe 2, ZHANG Hao-Xiang 2, YE Zhi-Zhen 1
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图3 LED芯片GaN层上沉积AZO薄膜退火前后的断面SEM照片 Fig. 3 Cross sectional SEM images of AZO films deposited on GaN layers of LEDs a Before annealing; bAfter annealing |
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