AZO薄膜用于GaN基LED透明电极的性能研究
陈丹1, 吕建国1, 黄靖云1, 金豫浙2, 张昊翔2, 叶志镇1

Performances of GaN-based LEDs with AZO Films as Transparent Electrodes
CHEN Dan1, L#cod#x000dc; Jian-Guo1, HUANG Jing-Yun1, JIN Yu-Zhe2, ZHANG Hao-Xiang2, YE Zhi-Zhen1
图3 LED芯片GaN层上沉积AZO薄膜退火前后的断面SEM照片
Fig. 3 Cross sectional SEM images of AZO films deposited on GaN layers of LEDs a Before annealing; bAfter annealing