AZO薄膜用于GaN基LED透明电极的性能研究
陈丹1, 吕建国1, 黄靖云1, 金豫浙2, 张昊翔2, 叶志镇1

Performances of GaN-based LEDs with AZO Films as Transparent Electrodes
CHEN Dan1, L#cod#x000dc; Jian-Guo1, HUANG Jing-Yun1, JIN Yu-Zhe2, ZHANG Hao-Xiang2, YE Zhi-Zhen1
图2 退火前后AZO薄膜的a透过率曲线和bXRD图谱
Fig. 2 Optical transmittance spectra a and XRD patterns b of AZO films before and after annealing