Preparation and Properties of Porous α-Al2O3Based Ceramic Disk Substrates
CHEN Sheng-Bo1, LIU Xu-Guang1, ZHANG Bao-Quan1,2
图6 SiO 2 粉体a、Al 2 O 3 -1180b、4SiO 2 Al 2 O 3 -1180c、8SiO 2 Al 2 O 3 -1180d 和12SiO 2 Al 2 O 3 -1180e陶瓷片的XRD图谱 Fig. 6 XRD patterns of SiO 2 powder a, Al 2 O 3 -1180 b, 4SiO 2 Al 2 O 3 -1180 c, 8SiO 2 Al 2 O 3 -1180 d and 12SiO 2 Al 2 O 3 -1180 e