多孔α-Al<sub>2</sub>O<sub>3</sub>基陶瓷片状载体的制备与性能

多孔α-Al₂O₃基陶瓷片状载体的制备与性能

陈圣博¹, 刘旭光¹, 张宝泉^1,²

Preparation and Properties of Porous α-Al₂O₃Based Ceramic Disk Substrates

CHEN Sheng-Bo¹, LIU Xu-Guang¹, ZHANG Bao-Quan^1,²

图5 Al 2 O 3 -1180的进-退汞曲线及孔径分布插图
Fig. 5 Intrusion and extrusion mercury curves and pore size distribution of Al 2 O 3 -1180 a: Extrusion curve; b: Intrusion curve; Inset: Pore size distribution curve