Preparation and Properties of Porous α-Al2O3Based Ceramic Disk Substrates
CHEN Sheng-Bo1, LIU Xu-Guang1, ZHANG Bao-Quan1,2
图2 #cod#x003b1;-Al 2 O 3 粉体a和不同温度烧结b: 850℃; c: 1080℃; d: 1180℃; e: 1280℃制备的#cod#x003b1;-Al 2 O 3 陶瓷片的XRD图谱 Fig. 2 XRD patterns of #cod#x003b1;-Al 2 O 3 powdera and #cod#x003b1;-Al 2 O 3 ceramic disks sintered at 850℃ b, 1080℃ c, 1180℃ d and 1280℃ e