多孔α-Al<sub>2</sub>O<sub>3</sub>基陶瓷片状载体的制备与性能

多孔α-Al₂O₃基陶瓷片状载体的制备与性能

陈圣博¹, 刘旭光¹, 张宝泉^1,²

Preparation and Properties of Porous α-Al₂O₃Based Ceramic Disk Substrates

CHEN Sheng-Bo¹, LIU Xu-Guang¹, ZHANG Bao-Quan^1,²

图1 多孔#cod#x003b1;-Al 2 O 3 基陶瓷片的烧结升温程序
Fig. 1 Dependence of temperature on time during sintering porous #cod#x003b1;-Al 2 O 3 based ceramic disks