退火温度对Bi3.15(Eu0.7Nd0.15)Ti3O12铁电薄膜力学性能的影响

退火温度对Bi_3.15(Eu_0.7Nd_0.15)Ti₃O₁₂铁电薄膜力学性能的影响

蒋大洞, 郑学军, 龚跃球, 朱哲, 彭金峰

Effect of Annealing Temperature on the Mechanical Properties of Bi_3.15(Eu_0.7Nd_0.15)Ti₃O₁₂ Ferroelectric Thin Films

JIANG Da-Dong, ZHENG Xue-Jun, GONG Yue-Qiu, ZHU-Zhe, PENG Jin-Feng

图1 a 退火温度分别为600、650、700、750℃的BENT薄膜的XRD图谱, b 退火温度为750℃的BENT薄膜的EDS能谱分析
Fig. 1 a XRD patterns of BENT thin films annealed at 600℃, 650℃, 700℃, 750℃, b EDS analysis of BENT thin film annealed at 750℃