碳化硼球面薄膜及空心微球的制备
于小河1, 卢铁城1,2, 林涛1, 王自磊1, 陶勇1, 廖志君1,3

Preparation of Boron Carbide Spherical Films and Hollow Microsphere
YU Xiao-He1, LU Tie-Cheng1,2, LIN Tao1, WANG Zi-Lei1, TAO Yong1, LIAO Zhi-Jun1,3
图1 磁控滚动三维沉积装置图
Fig. 1 Magnetron rolling three-dimensional deposition equipment