溅射气压对直流磁控溅射ZnO:Al薄膜的影响

孙可为, 周万城, 黄珊珊, 唐秀凤

Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

SUN Ke-Wei, ZHOU Wan-Cheng, HUANG Shan-Shan, TANG Xiu-Feng

Fig. 1 Dependence of deposition rate on sputtering pressure The solid curve is the fitting line according to Keller-Simmons model