退火温度对TiO<sub>2</sub>基电阻开关器件性能的影响

退火温度对TiO₂基电阻开关器件性能的影响

李红霞, 季振国, 席俊华

Effects of Annealing Temperatures on Resistive Switching Characteristics of TiO₂ Based ReRAM

LI Hong-Xia, JI Zhen-Guo, XI Jun-Hua

图2 不同温度退火的TiO 2 薄膜的XRD图谱
Fig. 2 XRD patterns of TiO 2 thin films annealed at different temperatures