退火温度对TiO<sub>2</sub>基电阻开关器件性能的影响

退火温度对TiO₂基电阻开关器件性能的影响

李红霞, 季振国, 席俊华

Effects of Annealing Temperatures on Resistive Switching Characteristics of TiO₂ Based ReRAM

LI Hong-Xia, JI Zhen-Guo, XI Jun-Hua

图1 TiO 2 薄膜的紫外-可见光透射谱
Fig. 1 UV-Vis transmittance spectrum of TiO 2 films deposited for 90 min