用于GaN基发光二极管的蓝宝石图形衬底制备进展

崔林¹, 汪桂根¹, 张化宇¹, 周福强¹, 韩杰才^1,²

Progress in Preparation of Patterned Sapphire Substrate for GaN-based Light Emitting Diodes

CUI Lin¹, WANG Gui-Gen¹, ZHANG Hua-Yu¹, ZHOU Fu-Qiang¹, HAN Jie-Cai^1,²

图5 化学刻蚀纳米图形化蓝宝石衬底表面形貌低倍放大a和高倍放大b的SEM照片 [ 55 ]
Fig. 5 SEM surface morphologies of nano-patterned sapphire substrate prepared by chemical wet etching [ 55 ] a Pyramidal patterns in large-scale observed at a low magnification; b Pyramidal patterns observed at a relatively high magnification