用于GaN基发光二极管的蓝宝石图形衬底制备进展
崔林1, 汪桂根1, 张化宇1, 周福强1, 韩杰才1,2

Progress in Preparation of Patterned Sapphire Substrate for GaN-based Light Emitting Diodes
CUI Lin1, WANG Gui-Gen1, ZHANG Hua-Yu1, ZHOU Fu-Qiang1, HAN Jie-Cai1,2
图6 二维光子晶体表面模式蓝宝石衬底的SEM照片: a平面图b侧面图 [ 56 ]
Fig. 6 SEM images of sapphire substrate with a 2D-PC surface pattern, a plan view and b side view [ 56 ]