反应烧结碳化硅的磨削特征
姚旺1, 张宇民2, 韩杰才2, 周玉锋2

Grinding Characteristics of Reaction Bonded Silicon Carbide
YAO Wang1, ZHANG Yu-Min2, HAN Jie-Cai2, ZHOU Yu-Feng2
图1 RBSiC的典型磨削表面形貌
Fig. 1 Typical ground surface of RBSiC