AgInSbTe相变薄膜的热刻蚀腐蚀特性
李豪1,2, 耿永友1, 吴谊群1,3

Thermal Etching Characteristics of AgInSbTe Phase Change Film
LI Hao1,2, GENG Yong-You1, WU Yi-Qun1,3
图6 AgInSbTe薄膜在0.001 molL NaOH溶液中腐蚀20 min前后的AFM照片
Fig. 6 AFM images of the AgInSbTe film before and after etched in 0.001 molL NaOH solution for 20 min a Amorphous phase before etched; b Amorphous phase after etched; c Crystalline phase before etched; d Crystalline phase after etched